Microsystem technology / W. Menz, J. Mohr, O. Paul.
Material type: TextPublication details: Weinheim ; New York : Wiley-VCH, c2001. Description: xii, 500 p. : ill. ; 25 cmISBN: 3527296344Subject(s): MicroelectronicsDDC classification: 621.381 LOC classification: TK7874 | .M436 2001Online resources: Publisher description | Table of contentsNo physical items for this record
Includes bibliographical references (p. [465]-483) and index.
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